Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Range parameters of Au and Cs implanted into BN and SiC films
P.F.P. Fichtner, M.R. Herberts, P.L. Grande, M. Behar, D. Fink, F.C. ZawislakVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96075-n
File:
PDF, 354 KB
english, 1993