Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Simulation of ion sputtering of rotating amorphous or polycrystalline solids
S. Wege, M. Bautsch, D. Rübesame, H. Niedrig, T. WittichVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96083-o
File:
PDF, 233 KB
english, 1993