Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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On the efficiency of deposited energy density for ion beam mixing processes with ions implanted during and after thin metal film deposition
I.S. Tashlykov, I.M. Belyi, O.G. Bobrovich, S. Kalbitzer, O. Meyer, G.K. Wolf, B. EndersVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96084-p
File:
PDF, 269 KB
english, 1993