Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Computer simulation of point-defect distributions generated by ion implantation
M. Jaraíz, J. Arias, J.E. Rubio, L.A. Bailón, J. BarbollaVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96100-q
File:
PDF, 285 KB
english, 1993