A comparison of plasma immersion ion implantation with...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 80-81; Iss. part-P1

A comparison of plasma immersion ion implantation with conventional ion implantation

M.J. Kenny, L.S. Wielunski, J. Tendys, G.A. Collins
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Volume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96120-2
File:
PDF, 311 KB
english, 1993
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