Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Properties of carbon nitride thin films prepared by ion and vapor deposition
J.F.D. Chubaci, T. Sakai, T. Yamamoto, K. Ogata, A. Ebe, F. FujimotoVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96161-5
File:
PDF, 223 KB
english, 1993