Strain distribution in As+ and Sb+ ion implanted and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 80-81; Iss. part-P1

Strain distribution in As+ and Sb+ ion implanted and annealed 〈100〉 Si

Z.E. Horvath, G. Peto, Eva Zsoldos, J. Gyulai
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Volume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96179-g
File:
PDF, 222 KB
english, 1993
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