Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Reduced reverse temperature of ion beam induced amorphization/ crystallization for intermittent beam irradiation of silicon?
R. Kögler, V. Heera, W. Skorupa, E. Glaser, T. Bachmann, D. RückVolume:
80-81
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(93)96180-k
File:
PDF, 208 KB
english, 1993