Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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In situ detection of rearrangement processes during electron beam annealing of ion implanted InP
C. Maurer, R. Kallweit, H. Baumann, K. Bethge, E.F. KrimmelVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96182-c
File:
PDF, 306 KB
english, 1993