Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
![](/img/cover-not-exists.png)
Defect levels in silicon bombarded with light ions
J. Reisinger, I. PalmetshoferVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96184-e
File:
PDF, 375 KB
english, 1993