Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Pulsed UV laser irradiation effect for Sn+-implanted GaAs
H. Shibata, Y. Makita, T. Ikeda, M. Hasegawa, A. Yamada, S. Niki, T. Iida, S. UekusaVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96185-f
File:
PDF, 330 KB
english, 1993