Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Photon assisted implantation (PAI)
L.P. Biró, J. Gyulai, H. Ryssel, L. Frey, T. Kormány, N.M. Tuan, Z.E. HorváthVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96191-e
File:
PDF, 289 KB
english, 1993