Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Disorder in high-dose, high-energy O- and Si-implanted Si
S.L. Ellingboe, M.C. RidgwayVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96198-l
File:
PDF, 584 KB
english, 1993