Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Damage distribution in GaAs implanted at elevated temperature
M. Kalitzova, D. Karpuzov, N. Pashov, G. Vitali, M. Rossi, R. ScholzVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96201-m
File:
PDF, 298 KB
english, 1993