Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Optical doping of silicon with erbium by ion implantation
A. Polman, J.S. Custer, E. Snoeks, G.N. van den HovenVolume:
80-81
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(93)96202-n
File:
PDF, 500 KB
english, 1993