Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Codoping effects of As and Xe on ion-beam-induced epitaxial crystallization of Si
Masataka Hasegawa, Naoto Kobayashi, Nobuyuki HayashiVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96207-s
File:
PDF, 332 KB
english, 1993