Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Ion implanted arsenic in silicon
Arne Nylandsted Larsen, Birgit Christensen, Peter H. Christensen, Sergey Yu. ShiryaevVolume:
80-81
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(93)96212-u
File:
PDF, 346 KB
english, 1993