Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
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Structural characterisation of nitrogen ion implantation into silicon for sensor technology
A. Romano-Rodríguez, A. El-Hassani, J. Samitier, A. Pérez-Rodríguez, S. Martínez, J.R. Morante, J. Esteve, J. MontserratVolume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96213-v
File:
PDF, 244 KB
english, 1993