Structural characterisation of nitrogen ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 Vol. 80-81; Iss. part-P1

Structural characterisation of nitrogen ion implantation into silicon for sensor technology

A. Romano-Rodríguez, A. El-Hassani, J. Samitier, A. Pérez-Rodríguez, S. Martínez, J.R. Morante, J. Esteve, J. Montserrat
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Volume:
80-81
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(93)96213-v
File:
PDF, 244 KB
english, 1993
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