Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 95; Iss. 1
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A new technique for deposition of titanium carbonitride films at room temperature by high energy density pulse plasma
Pengxun Yan, Si-ze Yang, Bin Li, Xishen ChenVolume:
95
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)00305-x
File:
PDF, 329 KB
english, 1995