SiO2Ta2O5 sputtering yields: simulated and experimental...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1995 Vol. 95; Iss. 1

SiO2Ta2O5 sputtering yields: simulated and experimental results

E. Vireton, P. Ganau, J.M. Mackowski, C. Michel, L. Pinard, A. Remillieux, P. Laprat
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Volume:
95
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(94)00419-6
File:
PDF, 533 KB
english, 1995
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