Using a wedge oxide to monitor low energy beam purity by...

Using a wedge oxide to monitor low energy beam purity by means of therma-wave measurements in the Eaton NV-8200P ion implanter

Dennis E. Kamenitsa, N.O. Pearce
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Volume:
96
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)00446-3
File:
PDF, 430 KB
english, 1995
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