Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 96; Iss. 1-2
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Ion implantation of group IV or VI elements for n-type doping of InP
M.C. Ridgway, P. Kringhøj, C.M. JohnsonVolume:
96
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)00507-9
File:
PDF, 427 KB
english, 1995