Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 96; Iss. 1-2
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Synthesis of semi-insulating GaAs by As implantation and thermal annealing: structural and electrical properties
A. Claverie, H. Fujioka, L. Laânab, Z. Liliental-Weber, E.R. WeberVolume:
96
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)00511-7
File:
PDF, 559 KB
english, 1995