Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 96; Iss. 1-2
Modelling of charging effects in plasma immersion ion implantation
William En, Nathan W. CheungVolume:
96
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)00535-4
File:
PDF, 623 KB
english, 1995