Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 89; Iss. 1-4
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Ion beam mixing in metal/metal and nitride/metal layers — new perspectives
Klaus-Peter Lieb, Wolfgang Bolse, Michael UhrmacherVolume:
89
Year:
1994
Language:
english
Pages:
13
DOI:
10.1016/0168-583x(94)95188-8
File:
PDF, 1.22 MB
english, 1994