Ion beam mixing in metal/metal and nitride/metal layers —...

Ion beam mixing in metal/metal and nitride/metal layers — new perspectives

Klaus-Peter Lieb, Wolfgang Bolse, Michael Uhrmacher
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Volume:
89
Year:
1994
Language:
english
Pages:
13
DOI:
10.1016/0168-583x(94)95188-8
File:
PDF, 1.22 MB
english, 1994
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