Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 86; Iss. 3-4
Germanium implantation into substrates for integrated optics
B. Poumellec, A. Traverse, S. Artigaud, J. HervoVolume:
86
Year:
1994
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(94)95290-6
File:
PDF, 795 KB
english, 1994