Silicon nitride films prepared by high energy ion beam...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 86; Iss. 3-4

Silicon nitride films prepared by high energy ion beam enhanced deposition

J. Zemek, F. Černý, M. Závětová, M. Vaněček, V. Železný
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Volume:
86
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95292-2
File:
PDF, 496 KB
english, 1994
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