Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 86; Iss. 3-4
Hydrogen effects on the electrical properties of electron-irradiated n-type Si epilayers
N.V Shlopak, A.G Ulyashin, Yu.A BumaiVolume:
86
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95293-0
File:
PDF, 478 KB
english, 1994