Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 94; Iss. 3
Defect production in silicon implanted with 13.6 MeV boron ions
V.S. Varichenko, A.M. Zaitsev, A.A. Melnikov, W.R. Fahrner, N.M. Kasytchits, N.M. Penina, D.P. ErchakVolume:
94
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(94)95364-3
File:
PDF, 742 KB
english, 1994