Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 90; Iss. 1-4
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Damage accumulation and amorphization in GaAs by MeV Si+ ion implantation at different tilt angles
Zhao Qing-tai, Wang Zhong-lie, Xu Tian-bing, Zhu Pei-ran, Zhou Jun-siVolume:
90
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)95584-0
File:
PDF, 481 KB
english, 1994