Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 90; Iss. 1-4
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Determination by Raman scattering of the in depth damage profile in high energy ion implantation
R. Arès, Y.B. Trudeau, J.L. Brebner, G.E. Kajrys, M. JouanneVolume:
90
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95585-9
File:
PDF, 478 KB
english, 1994