Comparison of secondary ion emission induced in silicon...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 90; Iss. 1-4

Comparison of secondary ion emission induced in silicon oxide by MeV and keV ion bombardment

H. Allali, B. Nsouli, J.-P. Thomas, W. Szymczak, K. Wittmaack
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Volume:
90
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)95602-2
File:
PDF, 444 KB
english, 1994
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