Observation and simulation of focused ion beam induced...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 93; Iss. 4

Observation and simulation of focused ion beam induced damage

C. Vieu, G. Ben Assayag, J. Gierak
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Volume:
93
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(94)95632-4
File:
PDF, 980 KB
english, 1994
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