Identification of EOR defects due to the regrowth of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 84; Iss. 2

Identification of EOR defects due to the regrowth of amorphous layers created by ion bombardment

B. de Mauduit, L. Laânab, C. Bergaud, M.M. Faye, A. Martinez, A. Claverie
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Volume:
84
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95752-5
File:
PDF, 544 KB
english, 1994
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