Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 84; Iss. 2
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Nondestructive characterization of SIMOX structures
R.M. Geatches, K.J. Reason, A.J. Griddle, R.P. Webb, P.J. Pearson, P.L.F. Hemment, A. NejimVolume:
84
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(94)95766-5
File:
PDF, 592 KB
english, 1994