Measurements of thin oxide films of SiO2/Si(100)

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 85; Iss. 1-4

Measurements of thin oxide films of SiO2/Si(100)

W.N. Lennard, G.R. Massoumi, I.V. Mitchell, H.T. Tang, D.F. Mitchell, J.A. Bardwell
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Volume:
85
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95782-7
File:
PDF, 541 KB
english, 1994
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