Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 85; Iss. 1-4
RBS analysis of thin MoSix films: Correlation between stoichiometry and some features of sputtering
B. Elstner, A. Schöpke, B. SelleVolume:
85
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)95831-9
File:
PDF, 355 KB
english, 1994