Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 85; Iss. 1-4
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Sputtering phenomena of CoSi2 under low energy oxygen bombardment
B. Brijs, W. De Coster, H. Bender, J. Alay, P. Osiceanu, W. VandervorstVolume:
85
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95833-5
File:
PDF, 503 KB
english, 1994