Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 85; Iss. 1-4
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Production and analysis of buried nitride layers in Si/SiO2 with ion beam methods
D. Fröse, D. KolleweVolume:
85
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)95955-2
File:
PDF, 312 KB
english, 1994