Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 88; Iss. 1-2
The nonlinear effects in sputtering of solids due to straggling of energy loss
I.S. BitenskyVolume:
88
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)96082-8
File:
PDF, 628 KB
english, 1994