Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
Diffusion of implanted helium in Si and SiO2
Peter JungVolume:
91
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)96249-9
File:
PDF, 416 KB
english, 1994