Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
Correlation between the rheological properties and damaging of ion implanted kapton
J.C. Pivin, G.Delia Mea, V. Rigato, M. Tonidandel, S. CarturanVolume:
91
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(94)96268-5
File:
PDF, 657 KB
english, 1994