Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
High energy Ni ion implantation and thermal annealing for α-SiC single crystal
N. Shimatani, K. Kawatsura, S. Arai, T. Shiono, Y. Horino, Y. Mokuno, K. Fujii, H. Takeshita, S. Yamamoto, Y. Aoki, H. NaramotoVolume:
91
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)96280-4
File:
PDF, 1.11 MB
english, 1994