Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
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Ion beam assisted deposition of hydrogenated amorphous silicon nitride
G.K. Hubler, E.P. Donovan, C.R. GossettVolume:
91
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)96282-0
File:
PDF, 495 KB
english, 1994