Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
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Ion beam mixing of marker layers into amorphous aluminum oxide
Elizabeth A. Cooper, Michael NastasiVolume:
91
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)96285-5
File:
PDF, 461 KB
english, 1994