Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
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Molecular dynamics simulation of non-equilibrium low energy (1–100 eV) ion beam deposition processes
Ohashi Tetsuya, Miyake Kiyoshi, Ohashi KenyaVolume:
91
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)96293-6
File:
PDF, 417 KB
english, 1994