Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
Surface morphology of arsenic implanted silicon dioxide observed by atomic force microscopy
T.K.S. Wong, I.H. WilsonVolume:
91
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)96301-0
File:
PDF, 2.20 MB
english, 1994