Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
Oxide growth at a Si surface and role of radiation effects
Luca Verdi, Antonio Miotello, Roger KellyVolume:
91
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(94)96303-7
File:
PDF, 640 KB
english, 1994