Electron irradiation and selective Si epitaxial growth on...

Electron irradiation and selective Si epitaxial growth on Al2O3

M. Ishida, T. Tomita, H. Tayanaka, T. Nakamura
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
91
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(94)96304-5
File:
PDF, 1.10 MB
english, 1994
Conversion to is in progress
Conversion to is failed