Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 91; Iss. 1-4
Properties of RF sputtered B4C thin films
C.L Chiang, H. Holleck, O. MeyerVolume:
91
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(94)96311-8
File:
PDF, 433 KB
english, 1994